JPH05946B2 - - Google Patents

Info

Publication number
JPH05946B2
JPH05946B2 JP62099115A JP9911587A JPH05946B2 JP H05946 B2 JPH05946 B2 JP H05946B2 JP 62099115 A JP62099115 A JP 62099115A JP 9911587 A JP9911587 A JP 9911587A JP H05946 B2 JPH05946 B2 JP H05946B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
rod
element body
shaped
flat plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62099115A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63265573A (ja
Inventor
Hiroshi Tokumoto
Hiroshi Bando
Shigeru Wakyama
Fumiki Sakai
Chikayoshi Myata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Epson Corp filed Critical Agency of Industrial Science and Technology
Priority to JP62099115A priority Critical patent/JPS63265573A/ja
Publication of JPS63265573A publication Critical patent/JPS63265573A/ja
Publication of JPH05946B2 publication Critical patent/JPH05946B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Landscapes

  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP62099115A 1987-04-22 1987-04-22 微小位置決め装置 Granted JPS63265573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62099115A JPS63265573A (ja) 1987-04-22 1987-04-22 微小位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62099115A JPS63265573A (ja) 1987-04-22 1987-04-22 微小位置決め装置

Publications (2)

Publication Number Publication Date
JPS63265573A JPS63265573A (ja) 1988-11-02
JPH05946B2 true JPH05946B2 (en]) 1993-01-07

Family

ID=14238804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62099115A Granted JPS63265573A (ja) 1987-04-22 1987-04-22 微小位置決め装置

Country Status (1)

Country Link
JP (1) JPS63265573A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0670565A (ja) * 1992-08-18 1994-03-11 Olympus Optical Co Ltd 超音波振動子及び超音波アクチュエータ
US8217367B2 (en) 2008-06-04 2012-07-10 National University Corporation Kanazawa University Scanner device for scanning probe microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2223865B1 (en]) * 1973-03-27 1978-10-20 Thomson Csf
JPS61150287A (ja) * 1984-12-24 1986-07-08 Japan Storage Battery Co Ltd 圧電体変位装置

Also Published As

Publication number Publication date
JPS63265573A (ja) 1988-11-02

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